Segregated Power and Ground Design for Yield Improvement

ABSTRACT

A method includes encapsulating a plurality of package components in an encapsulant, and forming a first plurality of redistribution layers over and electrically coupling to the plurality of package components. The first plurality of redistribution layers have a plurality of power/ground pad stacks, with each of the plurality of power/ground pad stacks having a pad in each of the first plurality of redistribution layers. The plurality of power/ground pad stacks include a plurality of power pad stacks, and a plurality of ground pad stacks. At least one second redistribution layer is formed over the first plurality of redistribution layers. The second redistribution layer(s) include power lines and electrical grounding lines electrically connecting to the plurality of power/ground pad stacks.

BACKGROUND

In recent years, high-performance computing applications are gaininginterests. The high-performance computing applications may include aplurality of core devices integrated to a same wafer. New issues havebeen found in the manufacture of the high-performance computingapplications.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 13 illustrate the cross-sectional views of intermediatestages in the formation of a reconstructed wafer in accordance with someembodiments.

FIG. 14 illustrates a plane view of a reconstructed wafer in accordancewith some embodiments.

FIG. 15 illustrates a plane view of power pad stacks directly over apackage component and a magnified view of an example power pad stack inaccordance with some embodiments.

FIG. 16 illustrates the inter-layer spacings and the intra-layer spacingbetween the power pads in neighboring power pad stacks in accordancewith some embodiments.

FIG. 17 illustrates overlapped power pads in power pad stacks inaccordance with some embodiments.

FIG. 18 illustrate power pad stacks with the power pads havingmisaligned edges in accordance with some embodiments.

FIGS. 19 and 20 illustrate the shifting of power pads in the same powerpad stack in accordance with some embodiments.

FIGS. 21 and 22 illustrate power pad stacks with different number oflayers in accordance with some embodiments.

FIGS. 23, 24, and 25 illustrate the power pads with different sizes andshapes in power pad stacks in accordance with some embodiments.

FIGS. 26 and 27 illustrate the arrangement of vias connecting the powerpads in the same power pad stack in accordance with some embodiments.

FIG. 28 illustrates that a top pad overlaps a portion of a bottom pad ina power pad stack in accordance with some embodiments.

FIG. 29 illustrates that a top pad does not overlap any portion of abottom pad in a power pad stack in accordance with some embodiments.

FIG. 30 illustrates that a top pad of a power pad stack does not overlapany portion of a bottom pad in a neighboring power pad stack inaccordance with some embodiments.

FIG. 31 illustrates that a top pad of a power pad stack overlaps aportion of a bottom pad in a neighboring power pad stack in accordancewith some embodiments.

FIG. 32 illustrates some example shapes of power pads in power padstacks in accordance with some embodiments.

FIG. 33 illustrates power pad stacks forming an array in accordance withsome embodiments.

FIG. 34 illustrates power pad stacks forming a non-array repeatingpattern in accordance with some embodiments.

FIGS. 35, 36, and 37 illustrate the allocations of some power pad stacksin accordance with some embodiments.

FIGS. 38 and 39 illustrate the power lines and ground lines over powerpad stacks in accordance with some embodiments.

FIG. 40 illustrates a process flow for forming a reconstructed wafer inaccordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “underlying,” “below,”“lower,” “overlying,” “upper” and the like, may be used herein for easeof description to describe one element or feature's relationship toanother element(s) or feature(s) as illustrated in the figures. Thespatially relative terms are intended to encompass differentorientations of the device in use or operation in addition to theorientation depicted in the figures. The apparatus may be otherwiseoriented (rotated 90 degrees or at other orientations) and the spatiallyrelative descriptors used herein may likewise be interpretedaccordingly.

A power and ground redistribution structure (which may be used in ahigh-performance computing package) and the method of forming the sameare provided in accordance with some embodiments. The intermediatestages in the formation of the high-performance computing package areillustrated in accordance with some embodiments. Some variations of someembodiments are discussed. Embodiments discussed herein are to provideexamples to enable making or using the subject matter of thisdisclosure, and a person having ordinary skill in the art will readilyunderstand modifications that can be made while remaining withincontemplated scopes of different embodiments. Throughout the variousviews and illustrative embodiments, like reference numbers are used todesignate like elements. Although method embodiments may be discussed asbeing performed in a particular order, other method embodiments may beperformed in any logical order. In accordance with some embodiments ofthe present disclosure, the reconstructed wafer includes lowerredistribution layers and upper redistribution layers. The power pads inthe lower redistribution layers form power pad stacks, with the powerpads in neighboring power pad stacks having no overlap. The electricalshorting between neighboring power pad stacks is thus reduced.

FIGS. 1 through 13 illustrate the cross-sectional views of intermediatestages in the formation of a reconstructed wafer in accordance with someembodiments of the present disclosure. The reconstructed wafer mayinclude a high-performance computing package in accordance with someembodiments. The corresponding processes are also reflectedschematically in the process flow shown in FIG. 40.

Referring to FIG. 1, carrier 20 is provided, and release film 22 isformed on carrier 20. Carrier 20 is formed of a transparent material,and may be a glass carrier, a ceramic carrier, an organic carrier, orthe like. Release film 22 is in physical contact with the top surface ofcarrier 20. Release film 22 may be formed of a Light-To-Heat-Conversion(LTHC) coating material. Release film 22 may be applied onto carrier 20through coating. In accordance with some embodiments of the presentdisclosure, the LTHC coating material is capable of being decomposedunder the heat of light/radiation (such as a laser beam), and canrelease carrier 20 from the structure placed and formed thereon. Inaccordance with some embodiments, a dielectric buffer layer (not shown)is formed over release film 22. The dielectric buffer layer may beformed of a polymer such as polybenzoxazole (PBO), polyimide,benzocyclobutene (BCB), or another applicable polymer. In accordancewith alternative embodiments, the dielectric buffer layer is omitted.

Package components 26 are then placed over release film 22, for example,through Die-Attach Films (DAFs) 24. The respective process isillustrated as process 202 in the process flow 200 in FIG. 40. Packagecomponents 26 may include device dies (such as core device dies andInput/output (IO) dies) and packages with device dies therein. Thedevice dies may include semiconductor substrates and integrated circuitdevices (such as active devices, which include transistors, for example,not shown) at the front surface (the surface facing up) of therespective semiconductor substrates. The semiconductor substrates,integrated circuit devices, and the interconnect structures arerepresented as parts 28. In accordance with some embodiments of thepresent disclosure, package components 26 may include logic dies, whichmay include Central Processing Unit (CPU) dies, Graphic Processing Unit(GPU) dies, mobile application dies, Micro Control Unit (MCU) dies,BaseBand (BB) dies, Application processor (AP) dies, Field-ProgrammableGate Array (FPGA) dies, Application-Specific Integrated Circuit (ASIC)dies, and/or the like. Package components 26 may also include memorydies, input-output (IO) dies, or the like. The memory dies may includeHigh-Bandwidth Memory (HBM) stacks, Hybrid Memory Cubes (HMC), DynamicRandom Access Memory (DRAM) dies, Static Random Access Memory (SRAM)dies, or the like. Package components 26 may also include systempackages, with a system package including a plurality of packagesintegrated as a system. The corresponding package components 26 aresometimes referred to as System-on-Chip (SoC) dies.

Over parts 28 of package components 26, there may be metal pads 32. Inaccordance with some embodiments, metal pads 32 are formed of aluminumcopper, copper, nickel, aluminum, or the like. The edge portions of themetal pads may be covered by passivation layers 30, which may be formedof or comprise silicon oxide, silicon nitride, Undoped silicate glass,composite layers thereof, or the like.

Electrical connectors 34 may be formed over metal pads 32, with thelower portions of electrical connectors 34 penetrating throughpassivation layer 30 to contact metal pads 32 in accordance with someembodiments. Electrical connectors 34 are electrically connected to theintegrated circuit devices in package components 26. Electricalconnectors 34 may be formed of metal pillars (or metal pads). Electricalconnectors 34 may include some connectors for providing power (such asproviding VDD), some connectors for electrical grounding (VSS), someconnectors for signal routing, and the like. In accordance with someembodiments of the present disclosure, protection layer 36 is formed tocover electrical connectors 34, with some portions of protection layer36 covering electrical connectors 34. Protection layer 36 may be formedof a polymer, which may comprise PBO, polyimide, BCB, or the like.

Referring to FIG. 2, encapsulant 38 is dispensed to encapsulate packagecomponents 26, and to fill the gaps between package components 26. Therespective process is illustrated as process 204 in the process flow 200in FIG. 40. Encapsulant 38 is disposed in a flowable form, and is thencured into a solid form. Encapsulant 38 may include a molding compound,a molding underfill, an epoxy, and/or a resin. When formed of moldingcompound or molding underfill, encapsulant 38 may include a basematerial, which may be a polymer, a resin, an epoxy, or the like, andfiller particles (not shown) in the base material. The filler particlesmay be dielectric particles of SiO₂, Al₂O₃, silica, or the like, and mayhave spherical shapes. Also, the spherical filler particles may have thesame or different diameters. Encapsulant 38 is dispensed to a level sothat the top surface of encapsulant 38 is higher than the top ends ofelectrical connectors 34 and protection layers 36 in package components26.

Subsequent to the dispensing of encapsulant 38, as also shown in FIG. 3,a planarization process such as a Chemical Mechanical Polish (CMP)process or a mechanical grinding process is performed to planarizeencapsulant 38, protection layers 36, and electrical connectors 34 ofpackage components 26. The respective process is illustrated as process206 in the process flow 200 in FIG. 40. As a result, the electricalconnectors 34 of package components 26 are exposed.

In subsequent processes, redistribution structure 50 (FIG. 11) is formedover encapsulant 38, and the respective processes are shown in FIGS. 4through 11. FIGS. 4 through 7 illustrate the formation a lowerredistribution structure 50A in accordance with some embodiments.Referring to FIG. 4, dielectric layer DL1 is formed. The respectiveprocess is illustrated as process 208 in the process flow 200 in FIG.40. Dielectric layer DL1 may be formed using a polymer, which isdispensed in a flowable formed, and is then cured. In accordance withsome embodiments, dielectric layer DL1 is formed of PBO, polyimide, BCB,or the like.

Referring to FIG. 5, redistribution line (RDL) layer RDL1 is formed,which includes metal lines and pads. Throughout the description, theterm “RDL layer” is used to refer to the conductive features such asmetal lines and pads in a same layer collectively, and does notincluding vias. Accordingly, RDL layer RDL1 includes the portions of theredistribution lines over dielectric layer DL1. Vias via1 are alsoformed to extend into dielectric layer DL1 and electrically connect RDLlayer RDL1 to package components 26. The respective processes areillustrated as process 210 in the process flow 200 in FIG. 40. Inaccordance with some embodiments, the formation processes includepatterning dielectric layer DL1 to form openings, through whichelectrical connectors 34 of package components 26 are revealed,depositing a metal seed layer, forming a plating mask (such as a photoresist) over the metal seed layer, patterning the plating mask,performing a plating process to form RDL layer RDL1 and vias via1,removing the plating mask, and then removing the portions of the metalseed layer directly underlying the removed plating mask. The remainingportions of the metal seed layer are also considered as parts of the RDLlayer RDL1 and vias via1. The metal seed layer may include a copperlayer, or may include a composite layer including a titanium layer and acopper layer over the titanium layer, or the like. The plated materialmay include copper or a copper alloy, for example.

FIG. 6 illustrates the formation of dielectric layer DL2, which may beformed using a material selected from the same group of candidatematerials for forming dielectric layer DL1. The respective process isillustrated as process 212 in the process flow 200 in FIG. 40. Insubsequent processes, as shown in FIG. 7, RDL layers RDL2 and RDL3, viasvia2 and via3, and dielectric layers DL3 and DL4 are formed. Therespective process is illustrated as process 214 in the process flow 200in FIG. 40. The materials and the formation processes of RDL layers RDL2and RDL3 and vias via2 and via3 may be similar to the material and theformation process, respectively, of RDL layer RDL1 and vias via1. Thematerials and the formation processes of dielectric layers DL3 and DL4may be similar to the material and the formation process, respectively,of dielectric layer DL2. For example, dielectric layers DL3 and DL4 maybe formed of polyimide, PBO, BCB, or the like. The details are thus notrepeated herein. Lower redistribution structure 50A, which includes RDLsRDL, RDL2, and RDL3, vias via1, via2, and via3, and dielectric layersDL1, DL2, DL3, and DL4, is thus formed. It is appreciated that althoughin the discussed example, the lower redistribution structure 50A hasthree RDL layers, the number of RDL layers in the lower redistributionstructure 50A may be two, four, five, or more in accordance with someembodiments.

FIGS. 8 through 11 illustrate the formation of an upper redistributionstructure 50B (FIG. 11) in accordance with some embodiments. Therespective process is illustrated as process 216 in the process flow 200in FIG. 40. Referring to FIG. 8, RDL layer RDL4 and vias via4 areformed. The material and the formation process of RDL layer RDL4 andvias via4 may be similar to the material and the formation process,respectively, of RDL layer RDL1 and vias via1. RDL layer RDL4 may alsoinclude metal lines and pads over dielectric layer DL4. Vias via4 extendinto dielectric layer DL4 to contact the metal lines and pads in RDLlayer RDL3.

Next, as shown in FIG. 9, vias via5 are formed. In accordance with someembodiments, the formation of vias via5 is performed using essentiallythe same process as for forming RDL layer RDL1. In accordance withalternative embodiments, the formation of vias via5 is performed sharinga same metal seed layer as RDL layer RDL4. The formation process of viasvia5 thus may be performed after the plating mask (not shown) forforming RDL layer RDL4 is removed, but before the exposed portions ofthe metal seed layer for forming RDL layer RDL4 are etched. Theformation process of vias via5 may include forming a plating maskcovering the plated RDL layer RDL4 and the un-etched metal seed layer,patterning the plating mask to expose some portions of RDL layer RDL4,plating the vias via5 in the openings in the plating mask, removing theplating mask, and then etching the portions of the metal seed layer notcovered by RDL layer RDL4.

Referring to FIG. 10, dielectric layer DL5 is formed. In accordance withsome embodiments, dielectric layer DL5 is formed of molding compound,molding underfill, an epoxy, a resin, or the like, and the formationprocess include dispensing dielectric layer DL5 in a flowable form, andthen curing dielectric layer DL5. A planarization process is performedto planarize the top surfaces of vias via5 and dielectric layer DL5.Vias via5 are thus revealed.

FIG. 11 illustrates the formation of RDL layers RDL5 and RDL6, viasvia6, and dielectric layers DL6 and DL7 in accordance with someembodiments of the present disclosure. The materials and the formationprocesses of RDL5 and RDL6 and vias via6 may be similar to the materialand the formation process, respectively, of RDL layer RDL4 and viasvia5. The materials and the formation processes of dielectric layers DL6and DL7 may be similar to the material and the formation process,respectively, of dielectric layer DL5. For example, dielectric layer DL6and DL7 may be formed of molding compounds, molding underfills, epoxies,resins, or the like. The formation processes may also includedispensing, curing and planarization processes. It is appreciated thatalthough the three RDL layers DL5, DL6, and DL7 are used as an example,the number of RDL layers in the upper redistribution structure may betwo, four, five, or more in accordance with some embodiments. In asubsequent process, conductive features 48, which may be Under-BumpMetallurgies (UBMs), may be formed.

Redistribution structure 50 is thus formed through the processes asshown in FIGS. 4 through 11. In accordance with some embodiments,redistribution structure 50 includes lower redistribution structure 50Aand upper redistribution structure 50B. The dielectric layers DL5, DL6,and DL7 in upper redistribution structure 50B may be thicker than any ofthe dielectric layers DL1, DL2, DL3, and DL4 in lower redistributionstructure 50A. For example, the thickness of DL5, DL6, and DL7 in upperredistribution structure 50B may be equal to 2 times (or more) thethickness of the dielectric layers DL1, DL2, DL3, and DL4 in lowerredistribution structure 50A. The metal lines and pads in upperredistribution structure 50B may also have greater thicknesses, pitches,spacings, etc., than the metal lines and pads in the lowerredistribution structure 50A. In accordance with some embodiments, theRDLs in the lower redistribution structure 50A may be used for signalrouting from package components to IO dies 26B (FIG. 14), and used forconnecting to the power lines in the upper redistribution structure 50B.The RDLs in the upper redistribution structure 50B may be used for powerrouting, and the RDLs in the upper redistribution structure 50B may beconnected to power modules. The RDLs in the upper redistributionstructure 50B may or may not be used for power routing.

Referring to FIG. 12, electrical connectors 56 are formed on the surfaceof redistribution structure 50. The respective process is illustrated asprocess 218 in the process flow 200 in FIG. 40. Electrical connectors 56and the RDLs in the redistribution structure 50 are electricallyconnected to package components 26. Throughout the description, thestructure over the dielectric buffer layer (or release film 22 if thedielectric buffer layer is not formed) is collectively referred to asreconstructed wafer 100.

In a subsequent process, redistribution structure reconstructed wafer100 is de-bonded from carrier 20, for example, by projecting laser onrelease film 22 in order to decompose release film 22, so thatreconstructed wafer 100 may be separated from carrier 20. The respectiveprocess is illustrated as process 220 in the process flow 200 in FIG.40. In accordance with some embodiments of the present disclosure, DAFs24 are removed, for example, in a cleaning process or a grindingprocess. The resulting reconstructed wafer 100 is shown in FIG. 13. In asubsequent process, the reconstructed wafer 100, which may include allof the device dies 26 therein, is bonded to additional packagecomponents 49 such as power modules, Integrated Passive Devices (IPDs),and/or the like. For example, the power modules may include Pulse WidthModulation (PWM) circuits for regulating power. In addition, sockets,pins, or the like may be connected to the IO dies 26B (FIG. 14).Reconstructed wafer 100 may not be sawed before bonding to packagecomponents 49. Alternatively, non-functional edge parts (which do notinclude package components therein) of the reconstructed wafer 100 maybe trimmed.

FIG. 14 illustrates a plane view of reconstructed wafer 100. The packagecomponents 26 are illustrated. In accordance with some embodiments,package components include core package components 26A and IO dies (orpackages) 26B. Core package components 26A may be laid out as an arrayor other repeating layouts such as a beehive pattern. In accordance withsome embodiments, the core package components 26A are identical to eachother, and have identical structures and identical functions. IO dies26B may be laid out surrounding the array formed of core packagecomponents 26A. There may also be sockets (not shown) in the peripheralregion of reconstructed wafer 100.

FIG. 15 illustrates the top view of one of core package components 26A,and power/ground pad stacks 52 overlapping a center region 26CR of corepackage component 26A. Throughout the description, power/ground padstacks 52 include the power pads for power supply pads such as VDD padsand electrical grounding (such as VSS) pads. If negative power supplyvoltages are adopted, power/ground pad stacks 52 will also include thepower pads for the negative power supply voltages. In addition, theremay be some dummy pad stacks, which are electrically floating. Since thedummy pad stacks are used for reducing the pattern-loading effect ofother power pad stacks, they are also referred to as power/ground padstacks 52.

Center region 26CR is surrounded by peripheral region 26PR, which formsa ring encircling center region 26CR. Power pad stacks 52 include thepower pads in RDL layer RDL1 up to an upper RDL layer RDNn, wherein “n”may be an integer equal to 2 or greater. Power/ground pad stacks 52 alsoinclude power pads in all of the RDLs between RDL layer RDL1 and RDLlayer RDLn. For example, when n is equal to 3, power/ground pad stacks52 include the power pads in each of RDL layers RDL1, RDL2, and RDL3.Integer n is also smaller than the total number of layers of RDLs inreconstructed wafer 10 by at least 1, and may be by 2 or 3. For example,in the example as shown in FIG. 13 in which the total number of RDLlayers is 6, “n” may be 5, 4, 3, or 2. FIGS. 17 and 18 illustrate someexamples, wherein power/ground pad stacks 52 include a positive powerpad stack 52-P and a ground power pad stack 52-G. Each of power/groundpad stacks 52 includes power pads pad-RDL1, pad-RDL2, and pad-RDL3 inRDL layers RDL1, RDL2, and RDL3, respectively.

Referring again to FIG. 15, in center region 26CR, there is nohorizontal power routing besides the power pads in power/ground padstacks 52. In accordance with some embodiments of the presentdisclosure, power/ground pad stacks 52 are fully separated from eachother by the dielectric layers such as DL1, DL2, and DL3 as shown inFIGS. 13, 17, and 18, and there is no conductive feature between thepower/ground pad stacks 52 in the center region 26CR. In the top viewshown in FIG. 15, there may not be power pads in any power pad stack 52overlapping any other power pad in other power pad stacks, and no powerpad stack 52 has any edge aligned to the edge of any other power padstack 52. Signal lines (not shown) may be distributed in peripheralregion 26PR, and distributed in the spacing between neighboring packagecomponents 26 (in the top view shown in FIG. 14), so that signals may berouted from core package components 26A to IO dies 26B as shown in FIG.14. Also, there is no signal RDLs formed between power/ground pad stacks52.

On the right side of FIG. 15, a top view of one of power/ground padstacks 52 is illustrated. The power pad stack 52 includes power padspad-RDL1, pad-RDL2, and pad-RDL3 in RDL layers RDL1, RDL2, and RDL3,respectively. Throughout the description, a number is attached to thenotation “pad-RDL” to show in which RDL layer the corresponding powerpad is located. A power pad in a power pad stack may also be referred towithout reciting the number of the respective RDL layer. For example, apower pad may be referred to as “pad-RDL1” to show that it is in RDLlayer 1, or may be referred to as “pad-RDL” to show it is a pad in apower/ground pad stack. For viewing purpose, power pads pad-RDL1,pad-RDL2, and pad-RDL3 are shown as being staggered. In otherembodiments, some or all of the corresponding edges of power padspad-RDL1, pad-RDL2, and pad-RDL3 may be aligned, or shifted relative toeach other, as will be discussed in subsequent paragraphs. In accordancewith some embodiments, the power pads in the power/ground pad stacks 52are solid metal pads with no holes therein. In accordance with otherembodiments, degassing holes 54 may be formed in the power pads, withthe degassing holes filled with dielectric materials. In FIG. 15,degassing holes 54 are shown using dashed lines to represent that theymay or may not be formed. Vias (such as vias via3) are formed tointerconnect the metal pads in the neighboring RDL layers. In subsequentFIGS. 16 through 37, the degassing holes 54 are not shown, while theymay or may not be formed in each of these figures. In some examples, thedimensions (such as lengths, widths, diameters, etc.) of the pads inpower pad stack 52 are in the range between about 20 μm and 50 μm, whilethe dimensions may be greater or smaller.

As shown in FIG. 13, the reconstructed wafer 100 may include a pluralityof package components 26, and hence a plurality of power pads are formedfor supplying power and for grounding. The lower dielectric layers suchas DL1, DL2, and DL3 may be relatively thin, and also the RDLs in RDLlayers RDL1, RDL2, and RDL3 are relatively narrow with relatively smallspacings. Accordingly, the power redistribution line in lower dielectriclayers are more likely to suffer from the problems such as electricalshorting. For example, some undesirable particles generated in themanufacturing process may short a positive power line/pad to aneighboring underlying ground line/pad if the positive power line/padoverlaps the ground line/pad, causing device failure. Accordingly,power/ground pad stacks 52 are used for vertical power/groundconnection, and are not used for lateral routing of power and electricalground. Through this design, the power distribution structure in thelower dielectric layer include individual power/ground pad stacks 52,and a positive power line/pad will not overlap any other groundline/pad, and a ground line/pad will not overlap any other positivepower line/pad. The possibility of electrical shorting is reduced. Onthe other hand, since the upper power redistribution structure such aswhat is in RDL layers RDL6, RDL5 (sometimes including RDL4) arerelatively wide with larger spacings, the possibility of electricalshorting is low, and these layers may be used for lateral power routing,and lateral power RDLs may be formed without forming discrete power padstacks.

FIG. 16 illustrates a plane view of two neighboring power/ground padstacks 52, with the spacings between the power pads marked. Throughoutthe description, the term “inter-layer spacing” is used to refer to thespacing between two power pads that are in different RDL layers, and theterm “intra-layer spacing” is used to refer to the spacing between twopower/ground pads that are in the same RDL layer. In the example shownin FIG. 16, spacings S1 and S2 are the inter-layer spacing ofpower/ground pads in two immediately neighboring layers. For example,spacing S1 is the inter-layer spacing between a power/ground pad in RDLlayer RDL1 and a power/ground pad in RDL layer RDL2, and spacing S2 isthe inter-layer spacing between a power/ground pad in RDL layer RDL2 anda power/ground pad in RDL layer RDL3. In accordance with someembodiments, the inter-layer spacings (such as S1 and S2) of two powerpads in two immediate neighboring RDL layers and the intra-layerspacings are designed to be smaller than a threshold value that theelectrical shorting will not occur. For example, the particlesundesirably generated in the manufacturing process may have sizessmaller than 10 μm. Accordingly, the inter-layer spacings andintra-layer spacings S1, S2, and S3 may be defined as being greater than10 μm, so that if a particle contacts one of the power pads, theparticle will not be able to contact neighboring power pads to short thepower pads.

FIG. 17 illustrates two neighboring power/ground pad stacks 52. Theupper part of FIG. 17 illustrates a cross-sectional view, and the lowerpart illustrates a top view. In some examples, one of the power/groundpad stacks 52 is a power pad stack 52-P, and the other is a ground padstack 52-G. The edges of the upper power pads in upper RDL layers arevertically aligned to the edges of the lower power pads. As shown in thelower part of FIG. 17, the power pads in different RDLs may have thesame size and the same shape, and the upper power pads may fully overlapthe respective lower power pads.

FIG. 18 illustrates two neighboring power/ground pad stacks 52. Theupper part of FIG. 18 illustrates a cross-sectional view, and the lowerpart illustrates a top view. Some or all edges of the upper power padsin upper RDL layers may be misaligned with the edges of the lower powerpads, while other edges may be aligned or misaligned. As shown in thelower part of FIG. 18, the power pads in different RDLs may havedifferent sizes and/or different shapes.

As shown in FIGS. 17 and 18, each of the power/ground pad stacks 52 iselectrically connected to one of the electrical connectors 34 in therespective underlying package component 26A. There may be a one-to-onecorrespondence between the power/ground pad stacks 52 and the respectiveconnecting electrical connectors 34. On the other hand, some of theelectrical connectors 34 of the package component 26A may be used forsignal routing, and are not connected to power/ground pad stacks 52. Thesignal electrical connectors 34 may be arranged in the peripheral region26PR (FIG. 15) of the corresponding package component 26A. Theelectrical connectors 34 for power and grounding may be arranged in thecenter region 26CR of the corresponding package component 26A.

FIGS. 19 and 20 illustrate some overlapping scheme of the power pads inthe same power pad stack 52. The power pads in the same power pad stack52 may have the same top-view size and the same top-view shape, with allcorresponding edges aligned. Alternatively, a power pad may partiallyoverlap its corresponding underlying power pad(s). A power pad, however,will overlap at least a part of its immediate underlying power pad, sothat a via (vias) may be formed to interconnect the power pads. FIG. 19illustrates the overlapping of power pads in accordance with someembodiments, wherein the power pads are staggered (shifted) relative toeach other to reduce stress. Each upper power pad overlaps at least aportion of each of the underlying power pads. FIG. 20 illustrates theoverlapping of power pads in accordance with other embodiments, whereinthe power pad pad-RDL3 overlaps the immediate underlying pad pad-RDL2,and does not overlap pad pad-RDL1, which is not immediately underlyingpad-RDL3. In accordance with some embodiments, the shift “x” of a pad inwidth direction of the pad relative to its immediate underlying pad issmaller than or equal to W/2, wherein W is the width of the pad(s). Theshift “y” of a pad in length direction of the pad relative to itsimmediate underlying pad is smaller than or equal to L/2, wherein L isthe length of the pad(s).

FIGS. 21 and 22 illustrate that the power/ground pad stacks 52 mayextend into different number of RDL layers. In accordance with someembodiments as shown in preceding FIGS. 17 and 18, power/ground padstacks 52 extend into RDL layers RDL1, RDL2, and RDL3. Power/ground padstacks 52 may also extend into all RDL layers in lower redistributionstructure 50A, and do not extend into any RDL layer in upperredistribution structure 50B. Since the lower redistribution structure50A (refer to FIG. 13) are thinner and have smaller spacings betweenneighboring RDLs, forming the power/ground pad stacks 52 in lowerredistribution structure 50A but not extending into upper redistributionstructure 50B may maximize the benefit of reducing electrical shorting,which is more likely to occur in the lower redistribution structure 50A,without sacrificing the power routing ability in the upperredistribution structure 50B. FIG. 21 illustrates some embodiments, inwhich power/ground pad stacks 52 may extend into RDL layers RDL1 andRDL2, and do not extend into RDL layers RDL3, RDL4, RDL5, RDL6, and thelike. FIG. 22 illustrates some embodiments, in which power/ground padstacks 52 may extend into RDL layers RDL1, RDL2, RDL3, and RDL4, and donot extend into RDL layers RDL5, RDL6, and the like.

FIGS. 23, 24, and 25 illustrate that the power pads in power pad stacksmay have any shapes and sizes, and the shapes and sizes of power pads inthe same power pad stack may be the same or different from each other.For example, in FIG. 23, the power pads have rectangular shapes, andhave the same shape and the same size. The sizes and the shapes ofdifferent power pads in the same power pad stack 52 may also be the sameor different from each other. In FIG. 24, the power pads have differentshapes and sizes, and the top pad pad-RDL3 has at least a portionoverlapping each of the underlying power pads. In FIG. 25, the powerpads have different shapes and sizes, and the top pad pad-RDL3 does notoverlap any portion of pad pad-RDL1.

FIGS. 26 and 27 illustrate how vias are formed to interconnectneighboring power pads in the same power pad stack 52. In FIG. 26, twoneighboring power pads are connected through a single via. In FIG. 27,two neighboring power pads are connected through a plurality of vias. Itis appreciated that the power pads may have degassing holes (refer todegassing holes 54 in FIG. 15), and the locations and sizes of the viasare allocated to avoid the degassing holes.

In FIG. 28, the power pads have same or different shapes and/or same ordifferent sizes, and the top pad pad-RDL3 has at least a portionoverlapping the bottom pad pad-RDL1. In FIG. 29, the power pads alsohave same or different shapes and/or same or different sizes, and thetop pad pad-RDL3 does not overlap any portion of pad pad-RDL1.

As addressed in preceding paragraphs, the inter-layer spacing ofneighboring power/ground pad stacks may be greater than about 10 μm whenthe inter-layer spacing is between two metal pads in two immediateneighboring RDL layers. On the other hand, this restriction may beloosened when the inter-layer spacing is between two metal pads in twonon-immediate neighboring RDL layers. For example, FIG. 30 illustratesthat a top pad pad-RDL3 is spaced apart from the bottom pad pad_RDL1 ina neighboring power pad stack by spacing S4, which may be greater than10 μm, equal to 10 μm, or smaller than 10 μm. FIG. 32 illustrates that atop pad pad-RDL3 overlaps the bottom pad pad_RDL1 in a neighboring powerpad stack. Since the vertical spacing between the pads in non-immediateneighboring RDL layers (such as pads pad-RDL3 and pad-RDL1) is large,the risk of electrical shorting is low even if overlapping occurs.

FIG. 32 illustrates some example shapes of power pads in power padstacks in accordance with some embodiments. Some example shapes includerectangles with right angles, rectangles with rounded corners, hexagons,octagons, circles, or the like.

FIGS. 33 and 34 illustrate the layout of power/ground pad stacks 52 inaccordance with some embodiments. FIG. 33 illustrates an embodiment inwhich power/ground pad stacks 52 are arranged as an array. FIG. 34illustrates an embodiment in which power/ground pad stacks 52 isarranged as another pattern other than array. For example, thepower/ground pad stacks 52 may be arranged as having a beehive patternor any other repeated pattern. The power/ground pad stacks 52 may alsobe arranged as having non-repeated patterns.

FIGS. 35, 36, and 37 illustrate the arrangements of neighboring powerpad stacks. It is appreciated that whether a power pad stack is designedas a power pad stack or a ground pad stack is related to the layout ofthe underlying electrical connectors in the corresponding underlyingpackage component 26A, and any layout may be adopted. For example, FIG.35 illustrates that four neighboring power/ground pad stacks 52 havethree positive power pad stacks 52-P and one ground pad stack 52-G. FIG.36 illustrates that four neighboring power/ground pad stacks 52 have twopositive power pad stacks 52-P and two ground pad stacks 52-G. FIG. 36illustrates that four neighboring power/ground pad stacks 52 have twopositive power pad stacks 52-P and two ground pad stacks 52-P, which arealternated in each row and each column.

FIGS. 38 and 39 illustrate the arrangement of the metal lines/pads inupper redistribution structure 50B. FIG. 38 illustrates that some powerpads and power redistribution lines in upper redistribution structure50B may have edges aligned to the edges of the corresponding underlyingpower redistribution lines in upper redistribution structure 50B. Forexample, the power pads/lines in RDL layers RDL4 and RDL5 have theiredges aligned to the edges of the corresponding underlying powerpads/lines in RDL 4. In FIG. 39, the power pads and power redistributionlines in upper redistribution structure 50B may overlap thecorresponding underlying power redistribution lines in upperredistribution structure 50B. For example, a power/ground pad/line inRDL layer RDL5 overlaps a neighboring power/ground pad/line in RDL layerRDL4, which neighboring power/ground pad/line in RDL layer RDL4 isconnected to a power pad stack.

The embodiments of the present disclosure have some advantageousfeatures. By forming power pad stacks in at least the lower portion ofthe lower redistribution structure as being discrete power/ground padstacks 52 that are spaced apart from each other, the risk of havingpower shorted to electrical ground is reduced. The embodiments of thepresent disclosure does not incur the increase in manufacturing costoccurred since the embodiments involve the change of photo lithographymasks, and do not involve the change in the manufacturing processes.

In accordance with some embodiments of the present disclosure, a methodincludes encapsulating a plurality of package components in anencapsulant; forming a first plurality of redistribution layers over andelectrically coupling to the plurality of package components, whereinthe first plurality of redistribution layers comprise a plurality ofpower/ground pad stacks, with each of the plurality of power/ground padstacks having a pad in each of the first plurality of redistributionlayers, and wherein the plurality of power/ground pad stacks comprise aplurality of power pad stacks; and a plurality of ground pad stacks; andforming at least one second redistribution layer over the firstplurality of redistribution layers, wherein the at least one secondredistribution layer comprises power lines and electrical groundinglines electrically connecting to the plurality of power/ground padstacks. In an embodiment, the forming the first plurality ofredistribution layers comprises applying a polymer layer; patterning thepolymer layer to form via openings; and plating the first plurality ofredistribution layers over the polymer layer, wherein vias aresimultaneously plated in the via openings. In an embodiment, the formingthe at least one second redistribution layer comprises forming the powerlines and the electrical grounding lines; forming additional vias overand contacting the power lines and the electrical grounding lines;molding the power lines, the electrical grounding lines, and theadditional vias in a molding compound; and planarizing the moldingcompound and the additional vias. In an embodiment, the plurality ofpower/ground pad stacks are directly over one of the plurality ofpackage components, and wherein in a top view of the plurality ofpackage components, the plurality of power/ground pad stacks are spacedpart from each other. In an embodiment, the plurality of power/groundpad stacks are directly over one of the plurality of package components,and wherein in a top view of the plurality of package components, theplurality of power/ground pad stacks are arranged as an array. In anembodiment, the method of claim further includes placing the pluralityof package components over a carrier; and after the at least one secondredistribution layer is formed, de-bonding the carrier from theplurality of package components. In an embodiment, the plurality ofpackage components, the first plurality of redistribution layers, andthe at least one second redistribution layer form a reconstructed wafer,and the method further comprises bonding the reconstructed wafer to anadditional package component. In an embodiment, the plurality ofpower/ground pad stacks collectively overlap a center region of one ofthe plurality of package components, and the first plurality ofredistribution layers are free from signal lines between the pluralityof power/ground pad stacks.

In accordance with some embodiments of the present disclosure, a packageincludes a package component; an encapsulant encapsulating the packagecomponent therein; a first plurality of dielectric layers over thepackage component and the encapsulant; a first plurality ofredistribution layers extending into the first plurality of dielectriclayers, wherein the first plurality of redistribution layers comprise aplurality of power/ground pad stacks arranged as an array overlappingthe package component, wherein the plurality of power/ground pad stackscomprise a plurality of power pad stacks and a plurality of ground padstacks, with each of the plurality of power/ground pad stacks having apad in each of the first plurality of redistribution layers; a secondplurality of dielectric layers over the first plurality ofredistribution layers; and a second plurality of redistribution layersover the first plurality of redistribution layers. In an embodiment, ina top view of the package component, the plurality of power/ground padstacks have a same shape, and are spaced part from each other. In anembodiment, the plurality of power/ground pad stacks have spacingsgreater than about 10 μm. In an embodiment, in each of the plurality ofpower/ground pad stacks, all pads in the first plurality ofredistribution layers have a same shape, and are vertically aligned toeach other. In an embodiment, the first plurality of dielectric layersare formed of polymers, and the second plurality of dielectric layersare formed of molding compounds. In an embodiment, the first pluralityof dielectric layers have three or more layers. In an embodiment, nosignal line is between the plurality of power/ground pad stacks.

In accordance with some embodiments of the present disclosure, a packageincludes a plurality of package components, wherein the plurality ofpackage components comprise device dies; a molding compoundencapsulating the plurality of package components therein; a firstplurality of redistribution layers over and electrically connecting tothe plurality of package components, wherein the first plurality ofredistribution layers comprise a plurality of metal pad arrays, witheach of the metal pad arrays overlapping a center region of one of theplurality of package components, and wherein each of the plurality ofmetal pad arrays comprises a plurality of power/ground pad stacks; and asecond plurality of redistribution layers over and electricallyconnecting to the first plurality of redistribution layers. In anembodiment, a power/ground pad stack in one of the metal pad arrayscomprises a plurality of metal pads electrically interconnected, andwherein the plurality of metal pads are electrically connected to apower pad or an electrical ground pad in a respectively underlyingpackage component. In an embodiment, upper pads in the power/ground padstack fully overlap corresponding lower pads in the power/ground padstack. In an embodiment, the plurality of metal pads in the power/groundpad stack are staggered. In an embodiment, neighboring power/ground padstacks in one of the metal pad arrays have spacings greater than about10 μm.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A method comprising: placing a plurality of package components over acarrier; encapsulating the plurality of package components in anencapsulant; forming a first plurality of redistribution layers over andelectrically coupling to the plurality of package components, whereinthe first plurality of redistribution layers comprise a plurality ofpower/ground pad stacks, with each of the plurality of power/ground padstacks having a pad in each of the first plurality of redistributionlayers, and wherein the plurality of power/ground pad stacks comprise: aplurality of power pad stacks; and a plurality of ground pad stacks;forming at least one second redistribution layer over the firstplurality of redistribution layers, wherein the at least one secondredistribution layer comprises power lines and electrical groundinglines electrically connecting to the plurality of power/ground padstacks; and after the at least one second redistribution layer isformed, de-bonding the carrier from the plurality of package components.2. The method of claim 1, wherein the forming the first plurality ofredistribution layers comprises: applying a polymer layer; patterningthe polymer layer to form via openings; and plating the first pluralityof redistribution layers over the polymer layer, wherein vias aresimultaneously plated in the via openings.
 3. The method of claim 1,wherein the forming the at least one second redistribution layercomprises: forming the power lines and the electrical grounding lines;forming additional vias over and contacting the power lines and theelectrical grounding lines; molding the power lines, the electricalgrounding lines, and the additional vias in a molding compound; andplanarizing the molding compound and the additional vias.
 4. The methodof claim 1, wherein the plurality of power/ground pad stacks aredirectly over one of the plurality of package components, and wherein ina top view of the plurality of package components, the plurality ofpower/ground pad stacks are spaced part from each other.
 5. The methodof claim 1, wherein the plurality of power/ground pad stacks aredirectly over one of the plurality of package components, and wherein ina top view of the plurality of package components, the plurality ofpower/ground pad stacks are arranged as an array.
 6. (canceled)
 7. Themethod of claim 1, wherein the plurality of package components, thefirst plurality of redistribution layers, and the at least one secondredistribution layer form a reconstructed wafer, and the method furthercomprises bonding the reconstructed wafer to an additional packagecomponent.
 8. The method of claim 1, wherein the plurality ofpower/ground pad stacks collectively overlap a center region of one ofthe plurality of package components, and the first plurality ofredistribution layers are free from signal lines between the pluralityof power/ground pad stacks.
 9. A package comprising: a packagecomponent; an encapsulant encapsulating the package component therein; afirst plurality of dielectric layers over the package component and theencapsulant, wherein the first plurality of dielectric layers are formedof polymers; a first plurality of redistribution layers extending intothe first plurality of dielectric layers, wherein the first plurality ofredistribution layers comprise a plurality of power/ground pad stacksarranged as an array overlapping the package component, wherein theplurality of power/ground pad stacks comprise a plurality of power padstacks and a plurality of ground pad stacks, with each of the pluralityof power/ground pad stacks having a pad in each of the first pluralityof redistribution layers; a second plurality of dielectric layers overthe first plurality of redistribution layers, wherein the secondplurality of dielectric layers are formed of molding compounds; and asecond plurality of redistribution layers over the first plurality ofredistribution layers.
 10. The package of claim 9, wherein in a top viewof the package component, the plurality of power/ground pad stacks havea same shape, and are spaced part from each other.
 11. The package ofclaim 10, wherein the plurality of power/ground pad stacks have spacingsgreater than about 10 μm.
 12. The package of claim 9, wherein in each ofthe plurality of power/ground pad stacks, all pads in the firstplurality of redistribution layers have a same shape, and are verticallyaligned to each other.
 13. (canceled)
 14. The package of claim 9,wherein the first plurality of dielectric layers have three or morelayers.
 15. The package of claim 9, wherein no signal line is betweenthe plurality of power/ground pad stacks.
 16. A package comprising: aplurality of package components, wherein the plurality of packagecomponents comprise device dies; a molding compound encapsulating theplurality of package components therein; a first plurality ofredistribution layers over and electrically connecting to the pluralityof package components, wherein the first plurality of redistributionlayers comprise a plurality of metal pad arrays, with each of the metalpad arrays overlapping a center region of one of the plurality ofpackage components, and wherein each of the plurality of metal padarrays comprises a plurality of power/ground pad stacks, and metal padsin the plurality of power/ground pad stacks are staggered with each ofan upper metal pad in each of the plurality of power/ground pad stackscomprising a first part overlapping a part of a corresponding lowermetal pad in the each of the plurality of power/ground pad stacks, and asecond part extending beyond edges of the corresponding lower metal pad;and a second plurality of redistribution layers over and electricallyconnecting to the first plurality of redistribution layers.
 17. Thepackage of claim 16, wherein a power/ground pad stack in one of themetal pad arrays comprises a plurality of metal pads electricallyinterconnected, and wherein the plurality of metal pads are electricallyconnected to a power pad or an electrical ground pad in a respectivelyunderlying package component.
 18. The package of claim 16, wherein allmetal pads in the each of the plurality of power/ground pad stacks havea same size and a same shape.
 19. (canceled)
 20. The package of claim16, wherein neighboring power/ground pad stacks in one of the metal padarrays have spacings greater than about 10 μm.
 21. The method of claim1, wherein each of the plurality of power pad stacks and the pluralityof power pad stacks comprises a plurality of metal pads, each in adielectric layer, and wherein upper ones of the plurality of metal padsoverlap corresponding lower ones of the plurality of metal pads.
 22. Thepackage of claim 16, wherein no signal lines are routed in the pluralityof metal pad arrays.